Inline sputter, PECVD silicon layer, ICP CVD system for graphane | A-Tech System
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[15/12/29] Has successfully 2015-12-29
[14/10/24] Succeed in spinna 2014-10-24
[14/05/16] Started order-mad 2014-05-16
[12/06/01] Completed the dev 2012-08-10
[11/01/24] PECVD equipment d 2011-01-21
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