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Sputtering Targets Stored in A-Tech System R&D Center
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Sputtering Targets Stored in A-Tech System R&D Center
위・아래
삭제
복제
복제전송
텍스트기본스타일
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- 현재창
- 새창
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| Type | EA | Thickness | etc | |
2 inch Target | Carbide blanks(60mm(D)) | 1 | 3.2t | |
| Strontium titanate(SrTiO₃) | 2 | 2t | ||
Indium(In) | 1 | 6.3t | ||
Indium(In) | 1 | 6.6t | ||
Graphite(C) | 1 | 6t | ||
ZnQ | 1 | 6.2t | Copper plate | |
3 inch Target | Aluminum(Al) | 4 | 3t | |
Aluminum(Al) | 6 | 3.2t | ||
Aluminum(Al) | 2 | 6.4t | ||
Aluminum(Al) - Copper(Cu) | 1 | 3.5t | ||
Cobalt(Co) | 1 | 3.2t | ||
Copper(Cu) | 2 | 6.4t | ||
Copper(Cu) | 1 | 6t | ||
Copper(Cu) | 1 | 5t | ||
Gallium(III) oxide(Ga₂O₃) | 1 | 6t | Copper plate | |
GIZ | 1 | 8t | Copper plate | |
Graphite(C) | 1 | 4t | ||
Graphite(C) | 1 | 6.5t | ||
Lead(Pb) | 1 | 6.6t | ||
Magnesium(Mg) | 2 | 6t | ||
Molybdenum(Mo) | 1 | 3.2t | ||
| Nickel(Ni, 80wt%) - Chromium(Cr. 20wt%) | 1 | 3.2t | ||
| Nickel(Ni, 80wt%) - Chromium(Cr. 20wt%) | 1 | 6.8t | Copper plate | |
| Nickel(Ni, 45wt%) - Copper(Cu, 55wt%) | 1 | 4.8t | ||
| Palladium(Pd) | 1 | 5t | ||
| Silicon dioxide(SiO₂) | 1 | 6t | Copper plate | |
| Silver(Ag) | 1 | 5t | ||
| Silver(Ag) | 2 | 6t | ||
| Stainless Steel 304 | 2 | 3t | ||
| Indium Tin Oxide(ITO) | 1 | 6.5t | Copper plate | |
| Iron(Fe) | 1t | 1.1t | Groove | |
| Iron(Fe) | 1t | 2.2t | Pattern | |
| Aluminum(Al) - Platinum(Pt, 0.5at%) | 1 | 3t | ||
| Aluminum(Al) - Platinum(Pt, 0.5at%) | 1 | 3.3t | ||
| Titanium(Ti) | 1 | 6t | ||
| Silicon(Si) | 1 | 6.5t | Copper plate | |
| Chromium(Cr) | 2 | 6.5t | ||
| Chromium(Cr) | 1 | 7.6t | ||
| 4 inch Target | Aluminum(Al) | 1 | 5t | |
| Aluminum(Al) | 1 | 6t | 변색 | |
| Calcium oxide(CaO) - Aluminium oxide(Al₂O₃) 12:7 | 1 | 9.6t | Copper plate | |
| Chromium(Cr) | 1 | 3.5t | ||
| Chromium(Cr) | 1 | 6t | ||
| Copper(Cu) | 1 | 6.5t | ||
| Graphite(C) | 1 | 6t | ||
| Silicon(Si, 70wt%) - Aluminium(Al, 30wt%) | 2 | 8t | ||
| Silicon(Si) polycrystalline | 1 | 6.5t | ||
| Silicon dioxide(SiO₂) | 1 | 6t | Copper plate | |
| Silicon dioxide(SiO₂) - Copper(Cu) | 1 | 6.5t | Copper plate | |
| Silicon(Si, 70wt%) - Tin(Sn, 30wt%) | 1 | 8t | ||
| Silicon(Si) | 1 | 7.3t | Copper plate | |
| SISPA(10 wt%) | 1 | 6t | ||
| Indium Tin Oxide(ITO) | 1 | 6.3t | Copper plate | |
| Iron(Fe) | 1 | 0.95t | ||
| Nickel(Ni) | 1 | 2t | ||
| Zinc(Zn) | 1 | 6.2t | ||
| Zinc(Zn, 80wt%) - Magnesium(Mg, 20wt%) | 1 | 5t | ||
| Ni (80wt%) - Cr (20wt%) | 1 | 6t | ||
| Zinc oxide(ZnO) | 1 | 6.1t | ||
5 inch Target | Ti-Al(50% : 50%) | 1 | 15t | |
| Chromium(Cr) | 1 | 6.5t | ||
| Copper(Cu) | 1 | 7.5t | ||
| Silicon(Si) | 1 | 5t | ||
| Titanium(Ti) | 1 | 5t | ||
| Chromium(Cr) | 1 | 15t | AIP target | |
| Titanium(Ti) - Aluminum(Al) - Nitride(N) | 1 | 15t | AIP target | |
| Titanium(Ti, 63at%) - Aluminum(Al, 27at%) - Silicon(Si, 10at%) | 1 | 15t | AIP target | |
| Aluminum(Al, 85at%) - Silicon(Si, 15at%) | 1 | 15t | AIP target | |
| Titanium(Ti, 33at%) - Aluminum(Al, 67at%) | 3 | 15.1t | AIP target | |
| Titanium(Ti, 33at%) - Aluminum(Al, 67at%) | 1 | 12t | AIP target | |
| 6 inch Target | Poly-Si | 2 | 9.5t | Molybdenum plate |
| Ta | 1 | 2.5t | ||
| Ta | 1 | 3.2t | ||
| ITO | 1 | 8t | Copper plate | |
| Aluminum(Al) | 1 | 6t | ||
| Aluminium(Al) | 1 | 6.3t | ||
| Aluminium(Al) | 1 | 6.2t | ||
| Aluminium(Al) | 2 | 7t | ||
| Aluminum(Al, 97wt%) - Copper(Cu, 2wt%) | 1 | 7t | ||
| Aluminum(Al, 97wt%) - Copper(Cu, 2wt%) | 2 | 7t | ||
| Copper(Cu) | 1 | 3.3t | ||
| Chromium(Cr) | 1 | 6t | ||
| Graphite(C) | 3 | 3t | ||
| Graphite(C) | 1 | 6t | ||
| Nickel(Ni) | 1 | 3.5t | ||
| Nickel(Ni) | 1 | 3.1t | ||
| Oxygen free copper | 2 | 4t | ||
| Silicon(Si) | 1 | 11.3t | Molybdenum plate | |
| Iron(Fe) | 1 | 1.7t | ||
| Iron(Fe) | 1 | 5t | Copper plate | |
| Tungsten(W) | 1 | 6t | ||
| Titanium(Ti) | 1 | 6.8t | Copper plate | |
| Silicon(Si) | 1 | 10t | Copper plate, Crack | |
| Silicon(Si) | 1 | 11.6t | Copper plate, Crack | |
| Silicon dioxide(SiO₂) | 1 | 6t | Copper plate, Crack | |
| Silicon dioxide(SiO₂) | 1 | 11.5t | Copper plate | |
| Silver(Ag) | 1 | 6t | ||
| Silver(Ag) | 1 | 11t | Copper plate | |
| Stainless steel 304 | 1 | 5.8t | ||
| Tin(Sn) | 1 | 6t | Copper plate | |
| Titanium(Ti) | 1 | 6t | ||
| Titanium(Ti) | 1 | 12t | Copper plate | |
| Titanium(Ti) | 1 | 6.1t | ||
| 7 inch Target | Aluminum(Al) | 2 | 6t | |
| Aluminium(Al, 98wt%) - Copper(Cu, wt%) | 1 | 6.5t | ||
| Chromium(Cr) | 1 | 13t | ||
| Cobalt(Co) | 1 | 3t | ||
| Molybdenum(Mo) | 1 | 13t | ||
| 8 inch Target | Aluminium(Al) - 1.5 Titanium(Ti) | 1 | 18t | |
| Silver(Ag) - Indium(In) - Antimony(Sb) - Tellurium(Te) | 1 | 16.5t | Copper plate | |
| IAST(Phase change alloy sputter target) | 1 | 16.5t | Copper plate | |
| Zinc sulfide(ZnS, 80wt%) - Silicon dioxide(SiO₂, 20wt%) | 1 | 14.5t | Copper plate | |
| Zinc sulfide(ZnS, 80wt%) - Silicon dioxide(SiO₂, 21wt%) | 1 | 14t | Copper plate | |
| In 5.6 - Ag 4 - Sb 61.1 - Fe 29.3 | 1 | 16t | Copper plate |
