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History & Accomplishments
A-Tech System
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| Period | Major revolution | |
| 1995 | February | A-Tech System founded |
| November | Developed ion beam source | |
| 1996 | September | Developed arc source |
| 1997 | October | Developed filtered cathodic vacuum arc system and process 1998 |
| 1998 | February | Development of High Temperature (1200 °C) High Speed Rotation (750 RPM) Substrate for PECVD (Plasma-Enhanced CVD) |
| May | Development of a Sputter System for Mass Production | |
| July | Development of Mass Production Sputter System for SAW Filter | |
| 1999 | July | Developed LPCVD for nanotube synthesis |
| 2000 | November | Opened Bucheon factory in Bucheon Techno Park |
| 2001 | February | Established R&D center |
| September | Developed silica PECVD system | |
| 2002 | January | Developed UHV(Ultra High Vacuum) sputtering system |
| January | Participated in PDP manufacturing technology development project(supervised by KIMM) | |
| April | Developed silica TCP (Transformer Coupled Plasma) etcher | |
| August | Produced UHV-sputter system for ferromagnetic multilayers | |
| September | Produced vacuum arc system for nitrides deposition | |
| 2003 | March | Fabricated in-line system of vacuum arc deposition for protecting PDP electrodes |
| November | Produced a high vacuum test system for a flat light source evaluation | |
| 2004 | January | Developed a multifunctional standard sputtering system for R&D |
| July | Agreed on the partnership with Atomate(USA) in the field of nanotube and nanowire | |
| 2005 | July | Agreed on the partnership with FEP(Fraunhofer Institut Elektronenstrahl-und Plasmatechnik) and FHR in the field of PVD |
| October | A-Tech System developed MOCVD system with Atomate(USA) | |
| September | A-Tech System, new factory completion | |
| A-Tech System, developed the NPPN(New Post Plasma Nitriding) System | ||
| December | Completion of headquarters and 1st plant/ transfer of business establishment (based on Cheongcheon-dong, Bupyeong-gu, Incheon) | |
| December | A-Tech System manufactured the sputter for polygon mirror applicable to laser printer | |
| 2006 | March | A-Tech System produced a production scale of arc ion plating (AIP) system |
| October | A-Tech System manufactured a production scale of AIP and NPPN systems | |
| November | A-Tech System developed a commercial ion plating system for various coloration | |
| 2007 | April | A-Tech System developed a pilot scale of arc discharge equipment for CNT transparent electrode |
| September | A-Tech System developed a sputter web coater for flexible display research | |
| December | A-Tech System developed a sputter system for ophthalmic | |
| 2008 | January | A-Tech System developed polycrystalline silicon ingot growing equipment |
| June | A-Tech System developed a PECVD system for anti-reflective coatings on solar cell | |
| 2009 | August | A-Tech System developed a PECVD system for graphene deposition |
| October | A-Tech System installed a thermal CVD system at HCM city National University in Vietnam and supplied a process condition. | |
| 2010 | March | A-Tech system developed a Al plasma nitriding equipment for mass production with KAITECH |
| 2011 | April | Built the second factory |
| 2012 | April | Signed business partnership with WESI(Taiwan) |
| December | Completed 10nm resolution of FIB (Focused Ion Beam) system development | |
| 2013 | December | Completed manufacturing scale of plasma nitriding and DLC PECVD equipment development |
| 2014 | March | Development and Fabrication of Ball Mill System |
| August | Development of 4-inch scale Vertical Growth CNT Process Optimization | |
| August | Completed sputtering system development for nanofoil fabrication | |
| August | Codeveloped bio-chip with nano holes using FIB with Gacheon Univ., Chungang Univ. and KTL | |
| 2016 | December | Development and completion of the project to develop T+2B Prototypes of Nanofusion Industry Union (Constructing the Large Area CNT Forest and producing CNT |
| 2017 | August | Participation in the Industrial Core Technology Development Project of the Ministry of Commerce, Industry and Energy - Development of 1-ton plasma nitrification equipment (main authority: Korea Institute of Production Technology) |
| 2018 | February | Sales and joint research of vertical orientation CNT forest and CNT yarn (Sunggyungwan University, Hanyang University, Korea Carbon Convergence Technology Institute, etc.) |
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| Period | Award/certification/patent and thesis details | |
| 2003 | July | High Density PECVD (Korea Semiconductor Equipment Association) Award |
| 2004 | September | ISO 14001 Acquisition |
| 2006 | February | Korea Occupational Safety and Technology Corporation's Clean Business Center Recognized |
| 2008 | September | ISO 9001 Acquisition |
| 2008 | November | Korea Institute of Production Technology Partner Designation |
| 2010 | January | UNITEF Award for Excellence in Research (Joint Research: Inha University Professor Chung Ji-won) |
| May | Nano Technology Integration Center of Electronics and Components Research Institute of Korea | |
| July | The combined growth value of carbon nanotubes using the arc shielding | |
| July | Patents - Double-sided, multi-layer laminated device of substrate using Reactive Sputtering process | |
| August | Incheon Metropolitan City's selection of promising small and medium-sized enterprises | |
| October | INNO-BIZ(기신중소음)인연장재교부 | |
| 2011 | May | CE Certification (OLED Purification Furnace) |
| November | Incheon Metropolitan City Certification of Non-Company Company | |
| 2012 | March | CE authentication (Graphen PECVD-PVD cluster system) |
| 2013 | August | CE certification (CVD and CNT Yaring system for CNT support synthesis) |
| October | Identification of Innovative Small and Medium Business (INNO-BIZ) under the auspices of the Small and Medium Business Administration | |
| 2014 | June | CE certification (High Temperature) |
| August | CE Authentication (Vertical Rawth CVD System) | |
| 2017 | May | Publish a CNT-related thesis (Joint Research: Advanced Functional Materials, 27(30), 17011108) |
| 2018 | February | Publish a CNT-related thesis (Joint Research Team, Advanced Functional Materials, 280, 1706007) by Professor Seo Dong-seok of Sungkyunkwan University |
